Title :
Room temperature bonding of sapphire with sapphire or metal substrates in Air using Au films
Author :
Ishii, M. ; Kon, Hiroyuki ; Uomoto, M. ; Nakaya, T. ; Shimatsu, T.
Author_Institution :
Namiki Precision Jewel Co., Ltd., Yuzawa, Japan
Abstract :
Room temperature bonding of sapphire-sapphire and sapphire-metal substrates was achieved in Air using Au films. This bonding technique can support expansion of the potential applications of sapphire in diverse industries.
Keywords :
gold; metallic thin films; sapphire; substrates; wafer bonding; Al2O3; Au; gold films; room temperature bonding; sapphire-metal substrates; sapphire-sapphire substrates; temperature 293 K to 298 K; Bonding; Educational institutions; Films; Gold; Steel; Substrates;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4799-5260-1
DOI :
10.1109/LTB-3D.2014.6886166
