Integration of III–V materials and Si-CMOS through double layer transfer process

A method to integrate III-V compound semiconductor and SOI-CMOS on Si substrate is demonstrated. The SOI-CMOS layer is temporarily transferred on a Si handle wafer. Another III-V/Si substrate is then bonded to the SOI-CMOS containing handle wafer. Finally, the handle wafer is released to realize the SOI-CMOS on III-V/Si substrate. Through this method, high temperature III-V materials growth can be completed without the presence of the CMOS layer, hence damage to the CMOS layer is avoided.