Title :
Thermocouples fabricated on microfluidic trench sidewall capped with film
Author :
Shibata, Masatoshi ; Yamaguchi, Toru ; Kumagai, Shinya ; Sasaki, Motoharu
Author_Institution :
Sch. of Eng., Toyota Technol. Inst., Nagoya, Japan
Abstract :
Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.
Keywords :
microfabrication; microfluidics; photolithography; thermocouples; 3D photolithography; hot gas; local temperature measurement; microfluidic trench sidewall; open voltage; thermocouples; wafer top surface; Biomedical optical imaging; Films; Microchannels; Microfluidics; Optical device fabrication; Temperature measurement; Temperature sensors;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4799-5260-1
DOI :
10.1109/LTB-3D.2014.6886176
