DocumentCode
1792601
Title
Thermocouples fabricated on microfluidic trench sidewall capped with film
Author
Shibata, Masatoshi ; Yamaguchi, Toru ; Kumagai, Shinya ; Sasaki, Motoharu
Author_Institution
Sch. of Eng., Toyota Technol. Inst., Nagoya, Japan
fYear
2014
fDate
15-16 July 2014
Firstpage
37
Lastpage
37
Abstract
Thermocouples on the trench sidewall fronting on the flow is fabricated by applying 3D photolithography. Without the flow, the thermocouple on the trench sidewall shows the same temperature with that on the wafer top surface apart from the channel. When the hot gas starts to flow, the thermocouple on the sidewall shows the response increasing its open voltage. The local temperature is measured accurately.
Keywords
microfabrication; microfluidics; photolithography; thermocouples; 3D photolithography; hot gas; local temperature measurement; microfluidic trench sidewall; open voltage; thermocouples; wafer top surface; Biomedical optical imaging; Films; Microchannels; Microfluidics; Optical device fabrication; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
Conference_Location
Tokyo
Print_ISBN
978-1-4799-5260-1
Type
conf
DOI
10.1109/LTB-3D.2014.6886176
Filename
6886176
Link To Document