DocumentCode
1792609
Title
Real time FITR spectroscopic and kinetic studies of Cu surface reduction by using formic acid vapor
Author
Chia-Chen Kuo ; Jenn-Ming Song
Author_Institution
Dept. of Mater. Sci. & Eng., Nat. Chung Hsing Univ., Taichung, Taiwan
fYear
2014
fDate
15-16 July 2014
Firstpage
41
Lastpage
41
Abstract
In this study, an real time FTIR system was adopted to monitor the reactions between formic acid vapors and the oxidized copper surface at difference temperatures. A cuprous oxide (Cu2O) surface layer with the thickness of 130nm can be perfectly reduced to metallic Cu by low concentration formic acid vapor at a temperature down to 200°C, and the reduction rate increases with a higher reaction temperature. It is suggested that there exists a critical temperature at about 250°C, above which H2 may dissociate into H+, and combines with OH- boned on the sample surface to form large amounts of H2O. A much higher activation energy may support this point.
Keywords
Fourier transform spectra; catalysis; copper; dissociation; infrared spectra; integrated circuit packaging; organic compounds; oxidation; reduction (chemical); three-dimensional integrated circuits; Cu; activation energy; catalytic reaction; copper surface reduction; cuprous oxide surface layer; dissociation; formic acid vapors; oxidized copper surface; real time FTIR system; Bonding; Copper; Real-time systems; Surface cleaning; Three-dimensional displays; Water;
fLanguage
English
Publisher
ieee
Conference_Titel
Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
Conference_Location
Tokyo
Print_ISBN
978-1-4799-5260-1
Type
conf
DOI
10.1109/LTB-3D.2014.6886180
Filename
6886180
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