Title :
Real time FITR spectroscopic and kinetic studies of Cu surface reduction by using formic acid vapor
Author :
Chia-Chen Kuo ; Jenn-Ming Song
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Chung Hsing Univ., Taichung, Taiwan
Abstract :
In this study, an real time FTIR system was adopted to monitor the reactions between formic acid vapors and the oxidized copper surface at difference temperatures. A cuprous oxide (Cu2O) surface layer with the thickness of 130nm can be perfectly reduced to metallic Cu by low concentration formic acid vapor at a temperature down to 200°C, and the reduction rate increases with a higher reaction temperature. It is suggested that there exists a critical temperature at about 250°C, above which H2 may dissociate into H+, and combines with OH- boned on the sample surface to form large amounts of H2O. A much higher activation energy may support this point.
Keywords :
Fourier transform spectra; catalysis; copper; dissociation; infrared spectra; integrated circuit packaging; organic compounds; oxidation; reduction (chemical); three-dimensional integrated circuits; Cu; activation energy; catalytic reaction; copper surface reduction; cuprous oxide surface layer; dissociation; formic acid vapors; oxidized copper surface; real time FTIR system; Bonding; Copper; Real-time systems; Surface cleaning; Three-dimensional displays; Water;
Conference_Titel :
Low Temperature Bonding for 3D Integration (LTB-3D), 2014 4th IEEE International Workshop on
Conference_Location :
Tokyo
Print_ISBN :
978-1-4799-5260-1
DOI :
10.1109/LTB-3D.2014.6886180