Title :
Magnification of interferogram with the use of digital holography
Author :
Ivanov, V. ; Pul´kin, Sergey ; Sevryugin, Alexander ; Venediktov, Vladimir
Author_Institution :
Quantum Electron. Dept., St.-Petersburg State Univ., St. Petersburg, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.
Keywords :
height measurement; holographic interferometry; light interference; optical phase conjugation; digital holography; height measurements; holographic interferometry method; interferogram magnification; mutually complex conjugated phases; size 10 nm; Diffraction; Lighting; Real-time systems; dynamic holography; holographic intereferometry; liquid crystal; spatial light modulator;
Conference_Titel :
Laser Optics, 2014 International Conference
Conference_Location :
Saint Petersburg
Print_ISBN :
978-1-4799-3884-1
DOI :
10.1109/LO.2014.6886309
