Optical inspection of microchannels formed by femtosecond laser on glass

Author

Bessmelsev, Victor P. ; Bulushev, Evgeny D. ; Dostovalov, A.V.

Author_Institution

Inst. of Autom. & Electrometry, Novosibirsk, Russia

fYear

2014

fDate

June 30 2014-July 4 2014

Firstpage

1

Lastpage

1

Abstract

The aim of the research was to provide precise inspection of surface of optically transparent materials micromachined by a femtosecond laser. We found that despite the fact that pulse durations are in a femtosecond range in case of non optimal processing modes cleavages may be formed at the border of heat affected zone, and profiles of micro channel are not uniform. For measurement of micro channels the optical inspection technique based on fluorescent confocal laser scanning microscopy and data analysis algorithms was developed.

Keywords

data analysis; laser beam machining; micro-optics; micromachining; optical glass; optical testing; data analysis algorithms; femtosecond laser; femtosecond range; fluorescent confocal laser scanning microscopy; glass; heat affected zone border; microchannel border; microchannel measurement; micromachining; nonoptimal processing modes; optical inspection technique; optically transparent material surface; precise inspection; pulse durations; Integrated optics; Ultrafast optics; confocal microscopy; femtosecond laser micromachining; fluorescence microscopy; image processing;

fLanguage

English

Publisher

ieee

Conference_Titel

Laser Optics, 2014 International Conference

Conference_Location

Saint Petersburg

Print_ISBN

978-1-4799-3884-1

Type

conf

DOI

10.1109/LO.2014.6886343

Filename

6886343