Title :
Optical inspection of microchannels formed by femtosecond laser on glass
Author :
Bessmelsev, Victor P. ; Bulushev, Evgeny D. ; Dostovalov, A.V.
Author_Institution :
Inst. of Autom. & Electrometry, Novosibirsk, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
The aim of the research was to provide precise inspection of surface of optically transparent materials micromachined by a femtosecond laser. We found that despite the fact that pulse durations are in a femtosecond range in case of non optimal processing modes cleavages may be formed at the border of heat affected zone, and profiles of micro channel are not uniform. For measurement of micro channels the optical inspection technique based on fluorescent confocal laser scanning microscopy and data analysis algorithms was developed.
Keywords :
data analysis; laser beam machining; micro-optics; micromachining; optical glass; optical testing; data analysis algorithms; femtosecond laser; femtosecond range; fluorescent confocal laser scanning microscopy; glass; heat affected zone border; microchannel border; microchannel measurement; micromachining; nonoptimal processing modes; optical inspection technique; optically transparent material surface; precise inspection; pulse durations; Integrated optics; Ultrafast optics; confocal microscopy; femtosecond laser micromachining; fluorescence microscopy; image processing;
Conference_Titel :
Laser Optics, 2014 International Conference
Conference_Location :
Saint Petersburg
Print_ISBN :
978-1-4799-3884-1
DOI :
10.1109/LO.2014.6886343
