Title :
Monolithic 50×50 MEMS silicon photonic switches with microsecond response time
Author :
Sangyoon Han ; Tae Joon Seok ; Quack, Niels ; Byung-wook Yoo ; Wu, Ming C.
Author_Institution :
Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.
Keywords :
cantilevers; elemental semiconductors; integrated optics; micro-optomechanical devices; microactuators; microswitches; optical switches; optical waveguides; silicon; MEMS cantilever; Si; microsecond response time; microsecond switching time; monolithic MEMS actuated silicon photonic switches; switching voltage; voltage 16 V; waveguide switches; Loss measurement; Micromechanical devices; Optical device fabrication; Optical losses; Optical switches; Optical waveguides; Silicon photonics;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.M2K.2
