Title :
Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics
Author :
Ying Huang ; Xianshu Luo ; Junfeng Song ; Tsung-Yang Liow ; Lo, Patrick Guo-Qiang
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A multi-layer Si3N4-on-SOI platform is demonstrated, achieving <;0.2dB transition loss between layers over 70nm bandwidth. 0.8dB/cm propagation loss is measured for PECVD Si3N4 waveguide at λ=1580nm. Thermal-optic micro-ring filter is also integrated on the platform.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; micro-optics; optical filters; optical waveguides; silicon; silicon compounds; silicon-on-insulator; thermo-optical devices; PECVD waveguide; Si3N4-Si; low loss CMOS compatible multilayer Si3N4-on-SOI platform; propagation loss; silicon photonics; thermal-optic microring filter; thermal-optics device integration; transition loss; wavelength 1580 nm; Loss measurement; Optical device fabrication; Optical losses; Optical waveguides; Propagation losses; Silicon;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th1A.1
