Title :
Integrated single and multi-layer Si3N4 platform for ultralow loss propagation and small bending radii
Author :
Spencer, Daryl T. ; Heck, Martijn J. R. ; Moreira, Renan ; Bovington, Jock ; Bowers, John E. ; Leinse, Arne ; Van den Vlekkert, H.H. ; Heideman, Rene G. ; Hoekman, Marcel ; Veenstra, Theo T.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
Abstract :
A combination of low loss and small bend radius Si3N4 waveguide regions are integrated with one etch step. Propagation losses of 1.5 dB/m and 7 dB/m are measured with a transition loss of ≤0.5 dB/taper.
Keywords :
integrated optics; light propagation; optical losses; optical waveguides; silicon compounds; Si3N4; integrated single platform; multilayer platform; small bending radii; transition loss; ultra-low loss propagation; waveguide; Microwave filters; Optical filters; Optical losses; Optical ring resonators; Optical waveguides; Photonics; Propagation losses;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th1A.2
