Title :
Adiabatically widened silicon microring resonators with improved tolerance to wafer-scale variations
Author :
Mikkelsen, Jared C. ; Sacher, Wesley D. ; Poon, Joyce K. S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
Silicon microrings with adiabatically widened bends are more tolerant to dimensional variations than standard designs. Improvements in the intra-die and wafer-scale variation of the resonance wavelength are demonstrated in the IMEC passives process.
Keywords :
elemental semiconductors; resonance; resonators; silicon; wafer-scale integration; whispering gallery modes; IMEC passives process; Si; adiabatically widened bends; adiabatically widened silicon microring resonators; dimensional variations; intradie variation; resonance wavelength; wafer-scale variation; wafer-scale variations; Couplers; Optical resonators; Optical waveguides; Photonics; Standards; Strips;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th2A.12
