Author :
Fowler, D. ; Baudot, C. ; Fedeli, J.M. ; Caire, B. ; Virot, L. ; Leliepvre, A. ; Grand, G. ; Myko, A. ; Marris-Morini, D. ; Messaoudene, S. ; Souhaite, A. ; Olivier, S. ; Grosse, P. ; Duan, Guang-Hua ; Ben Bakir, B. ; Boeuf, F. ; Vivien, L. ; Menezo, Sylv
Author_Institution :
Leti, CEA, Grenoble, France
Abstract :
We report performances of active and passive devices in a Silicon-Photonic library on a 300mm-CMOS-platform, showing highly uniform behavior of passive WDM devices, Mach-Zehnder modulators and germanium photo-detectors with state of the art performances.
Keywords :
CMOS integrated circuits; Mach-Zehnder interferometers; elemental semiconductors; germanium; integrated optoelectronics; optical modulation; photodetectors; silicon; wavelength division multiplexing; CMOS platform; Ge; Mach-Zehnder modulators; Si; Si-photonics device; active devices; passive WDM devices; photo-detectors; size 300 mm; wafers; Arrayed waveguide gratings; Germanium; Insertion loss; Libraries; Performance evaluation; Wavelength division multiplexing;
