Title :
Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform
Author :
Selvaraja, Shankar Kumar ; De Heyn, P. ; Winroth, Gustaf ; Ong, Patrick ; Lepage, G. ; Cailler, Celine ; Rigny, Arnaud ; Bourdelle, Konstantin K. ; Bogaerts, W. ; Van Thourhout, Dries ; Van Campenhout, J. ; Absil, P.
Author_Institution :
imec, Leuven, Belgium
Abstract :
Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-σ) within-wafer and within-device of 6.1nm and 1.2nm respectively.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; optical losses; optical waveguides; silicon; wavelength division multiplexing; wires; CMOS platform; Si; channel variation; highly uniform passive silicon photonics devices; low-loss passive silicon photonics devices; propagation loss; size 300 mm; size 6.1 nm to 1.2 nm; slot waveguides; wavelength-division multiplexing devices; wires; Optical losses; Optical waveguides; Propagation losses; Silicon photonics; Wavelength division multiplexing; Wires;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th2A.33
