Title :
Path to silicon photonics commercialization: 25 Gb/s platform development in a CMOS manufacturing foundry line
Author :
Lim, Andy Eu-Jin ; Tsung-Yang Liow ; Junfeng Song ; Chao Li ; Qing Fang ; Xiaoguang Tu ; Ning Duan ; Kok Kiong Chen ; Tern, Roger Poh Cher ; Chuan Peng ; Bong Woong Mun ; Islam, Md Nurul ; Jae Soo Park ; Subbu, Chivukula ; Guo-Qiang Lo
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Silicon photonics platform in a commercial 0.18 μm CMOS foundry line is described. Low-loss Si passives and high speed germanium photodetectors (>20GHz) with low dark current (~11nA) and high responsivity (1.06A/W) at 1550nm are presented.
Keywords :
CMOS integrated circuits; integrated optoelectronics; photodetectors; CMOS manufacturing foundry line; bit rate 25 Gbit/s; high speed germanium photodetector; low loss passive element; platform development; silicon photonics commercialization path; size 0.18 mum; wavelength 1550 nm; CMOS integrated circuits; Dark current; Optical fibers; Silicon photonics;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Th2A.51
