Title :
High-efficiency thermal-tunable microring resonators made of Cu-dielectric-Si hybrid plasmonic waveguides
Author :
Shiyang Zhu ; Lo, G.Q. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Thermally tunable microring resonators based on Cu-dielectric-Si hybrid plasmonic waveguide are fabricated on a SOI platform using standard CMOS technology, which have radius of 2.5-3 μm and Q-value of ~166. By placing the TiN heater above the Cu cap over a thin SiN layer, the thermo-optic (TO) devices offer high tuning efficiency of ~1.1 nm/mW and fast tuning speed of ~17.2 μs as compared with the conventional Si ring resonator based TO devices.
Keywords :
CMOS integrated circuits; copper; elemental semiconductors; micromechanical resonators; optical tuning; optical waveguides; silicon; silicon compounds; silicon-on-insulator; thermo-optical devices; titanium compounds; Cu-dielectric-Si hybrid plasmonic waveguides; Q-value; SOI platform; Si; SiN; TiN-Cu; heater; high-efficiency thermal-tunable microring resonators; standard CMOS technology; thermo-optic devices; tuning efficiency; tuning speed; Heating; Optical ring resonators; Optical waveguides; Plasmons; Silicon; Tuning;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2014
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-5575-2994-7
DOI :
10.1364/OFC.2014.Tu3E.5
