Design of MEMS based 4-bit shift register

This paper presents a unique design of MEMS based 4-bit shift register that perform shifting operation same as logic devices that are composed of solid-state transistors. The MEMS shift register design inherits all the advantages from MEMS switches and thus is expected to have more applications. One unique feature of this device is that it can perform all types of shifting mechanisms, but with different electrical and mechanical interconnects. The model consists of multiple switches working on the principle of electrostatic actuation. The shift register has 4 stages with each stage having 4 switches and each switch is one bit implementation of a 4 bit shift register. Since the basic logical switching operation is indicated by a mechanical deflection of a cantilever, the proposed system is accurate and reliable.