Optimal parameters determination for nanostructure-enhanced surface acoustic waves sensor

Author

Bogdan, Oleksandr ; Orlov, Alexei ; Pashkevich, Gennady ; Ulianova, Veronika ; Yakimenko, Y. ; Zazerin, Andrii

Author_Institution

Sci. & Res. Inst. of Appl. Electron., Nat. Tech. Univ. of Ukraine "Kyiv Polytech. Inst.", Kiev, Ukraine

fYear

2014

fDate

7-11 May 2014

Firstpage

427

Lastpage

431

Abstract

Various modifications of the ZnO nanostructures based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The influence of morphometric parameters (diameter and length) of ZnO nanostructures on output SAW sensor characteristics was investigated by finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for nanostructure-enhanced SAW sensor design could be estimated by the proposed approach.

Keywords

II-VI semiconductors; finite element analysis; nanosensors; nanostructured materials; surface acoustic wave sensors; wide band gap semiconductors; zinc compounds; SAW sensor design; ZnO; finite element simulation method; morphometric parameter; nanostructure-enhanced surface acoustic wave sensor; optimal parameter determination; performance parameter evaluation; two-port surface acoustic wave sensor design; versatile flexible multiparameter model; Finite element analysis; Nanostructures; Sensors; Substrates; Surface acoustic waves; Surface impedance; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology (ISSE), Proceedings of the 2014 37th International Spring Seminar on

Conference_Location

Dresden

Type

conf

DOI

10.1109/ISSE.2014.6887638

Filename

6887638