Title :
Optimal parameters determination for nanostructure-enhanced surface acoustic waves sensor
Author :
Bogdan, Oleksandr ; Orlov, Alexei ; Pashkevich, Gennady ; Ulianova, Veronika ; Yakimenko, Y. ; Zazerin, Andrii
Author_Institution :
Sci. & Res. Inst. of Appl. Electron., Nat. Tech. Univ. of Ukraine "Kyiv Polytech. Inst.", Kiev, Ukraine
Abstract :
Various modifications of the ZnO nanostructures based sensitive element for the two-port surface acoustic wave sensor (SAW) design were considered. The influence of morphometric parameters (diameter and length) of ZnO nanostructures on output SAW sensor characteristics was investigated by finite element simulation method. Obtained versatile flexible multiparameter model allowed the evaluation of performance parameters. The optimal parameters for nanostructure-enhanced SAW sensor design could be estimated by the proposed approach.
Keywords :
II-VI semiconductors; finite element analysis; nanosensors; nanostructured materials; surface acoustic wave sensors; wide band gap semiconductors; zinc compounds; SAW sensor design; ZnO; finite element simulation method; morphometric parameter; nanostructure-enhanced surface acoustic wave sensor; optimal parameter determination; performance parameter evaluation; two-port surface acoustic wave sensor design; versatile flexible multiparameter model; Finite element analysis; Nanostructures; Sensors; Substrates; Surface acoustic waves; Surface impedance; Zinc oxide;
Conference_Titel :
Electronics Technology (ISSE), Proceedings of the 2014 37th International Spring Seminar on
Conference_Location :
Dresden
DOI :
10.1109/ISSE.2014.6887638
