Development of a MEMS-enabled frequency selective surface

Author

Safari, Majid ; Shafai, Cyrus ; Shafai, L.

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of Manitoba, Winnipeg, MB, Canada

fYear

2014

fDate

13-16 July 2014

Firstpage

1

Lastpage

2

Abstract

A frequency selective surface (FSS) based on a capacitively loaded slot in a ground plane is presented. The loading of the slot is achieved by using a MEMS bridge fabricated over the slot. It is shown that varying the height of the MEMS bridge changes the capacitance of the system, which in turn changes the resonance frequency of the FSS. The device was fabricated and tested in an X-band waveguide with customized flanges. The measurements showed the resonance frequency successfully varied from 8.54 to 10.26 GHz. The simulated and measured reflection coefficients showed excellent agreement.

Keywords

flanges; frequency selective surfaces; micromechanical devices; FSS; MEMS bridge; MEMS-enabled frequency selective surface; X-band waveguide; capacitively loaded slot; customized flanges; ground plane; reflection coefficients; resonance frequency; Bridge circuits; Capacitance; Flanges; Frequency selective surfaces; Micromechanical devices; Resonant frequency; Switches; Frequency Selective Surface; MEMS Bridge; RF-MEMS; Tunable FSS;

fLanguage

English

Publisher

ieee

Conference_Titel

Antenna Technology and Applied Electromagnetics (ANTEM), 2014 16th International Symposium on

Conference_Location

Victoria, BC

Type

conf

DOI

10.1109/ANTEM.2014.6887759

Filename

6887759