Title :
Monolithic integration of suspended membrane disk resonator on silicon-on-insulator
Author :
Zhenzhou Cheng ; Ke Xu ; Hon Ki Tsang
Author_Institution :
Dept. of Electron. Eng., Chinese Univ. of Hong Kong, Hong Kong, China
Abstract :
Freestanding waveguide coupled pedestal disk, suspended adiabatic taper and focusing subwavelength gratings were monolithic integrated on silicon-on-insulator. The quality factor of ~105 with ~7 dB extinction ratio was measured in near-infrared.
Keywords :
Q-factor; diffraction gratings; extinction coefficients; integrated optics; optical resonators; optical waveguides; silicon-on-insulator; Si; extinction ratio; focusing subwavelength gratings; freestanding waveguide coupled pedestal disk; monolithic integration; quality factor; silicon-on-insulator; suspended adiabatic taper; suspended membrane disk resonator; Couplings; Focusing; Optical resonators; Scanning electron microscopy; Silicon; Silicon-on-insulator; Wavelength measurement;
Conference_Titel :
Optical Fibre Technology, 2014 OptoElectronics and Communication Conference and Australian Conference on
Conference_Location :
Melbourne, VIC
