Improved PID algorithms with application to excimer laser temperature control

The stability of temperature in the chamber of excimer laser has a great effect on working performance of the excimer especially for the energy stability and useful life. So it is very important to keep the chamber temperature constantly. Based on that, a high precision temperature control system of excimer laser and two improved PID control algorithms were designed. Experimental results indicate that the designed system runs reliably and has superior control precision which provides a favorable temperature environment for the laser´s operation.