Title :
Monitoring the glycerol concentration in aqueous glycerol solutions using a micromachined flow sensor
Author :
Cerimovic, S. ; Keplinger, F. ; Beigelbeck, R. ; Jachimowicz, A. ; Antlinger, Hannes ; Jakoby, Bernhard
Author_Institution :
Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Vienna, Austria
Abstract :
We present a measurement setup to monitor the glycerol concentration in aqueous glycerol solutions. The setup comprises a micromachined thermal flow sensor, a piezoelectric micropump, a well-defined flow channel, a differential pressure sensor, and a temperature controller for a constant setup temperature. The micropump establishes circulation with a constant pressure difference between in- and outlet of the channel ensuring a flow rate in the closed-loop system that is strictly related to the viscosity and, equivalently, to the glycerol concentration. A calorimetric flow sensor operating in the constant over-temperature mode measures the flow rate from which the glycerol concentration can be deduced. The overall system design was supported by FEM simulations. Finally, we report on measurement results which confirm good agreement between theory and experiment.
Keywords :
calorimetry; chemical sensors; chemical variables measurement; finite element analysis; flow measurement; flow sensors; microchannel flow; micromachining; micropumps; microsensors; organic compounds; piezoelectric transducers; pressure measurement; pressure sensors; temperature control; temperature sensors; FEM simulation; aqueous glycerol solution; calorimetric flow sensor; closed-loop system; constant over-temperature mode; constant pressure difference; constant setup temperature; differential pressure sensor; flow channel; flow measurement; glycerol concentration measurement; glycerol concentration monitoring; micromachined thermal flow sensor; piezoelectric micropump; temperature controller; viscosity; Liquids; Micropumps; Temperature; Temperature measurement; Temperature sensors; Thermistors; Viscosity;
Conference_Titel :
Microelectronic Systems Symposium (MESS), 2014
Conference_Location :
Vienna
DOI :
10.1109/MESS.2014.7010255