Title :
Concept study on an electrodynamically driven and read-out torsional oscillator
Author :
Heinisch, Martin ; Voglhuber-Brunnmaier, Thomas ; Reichel, Erwin K. ; Clara, Stefan ; Abdallah, Ali ; Jakoby, Bernhard
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
Abstract :
In this contribution a concept study for an electrody-namically driven and read-out torsional oscillator is presented. The fundamental mechanical and electrodynamical theory is explained in detail and measurements results obtained with first prototypes are discussed.
Keywords :
electrodynamics; oscillators; electrodynamical theory; electrodynamically driven oscillator; fundamental mechanical theory; read-out torsional oscillator; Coils; Frequency measurement; Oscillators; Resonant frequency; Rotors; Springs; Voltage measurement;
Conference_Titel :
Microelectronic Systems Symposium (MESS), 2014
Conference_Location :
Vienna
DOI :
10.1109/MESS.2014.7010256
