RF-MEMS: A development flow driving innovative device concepts to high performance components and networks for wireless applications

In this work the RF-MEMS technology available at the microfabrication facility of Fondazione Bruno Kessler - FBK (Italy) is discussed. The manufacturing flow, based on surface micromachining of Microsystems, enables the manufacturing of high performance and widely reconfigurable RF-MEMS passive lumped components, i.e. varactors, inductors and micro-relays, as well as complex networks, like phase shifters, impedance tuners, filters, power attenuators, etc. Despite the development flow of the mentioned RF-MEMS in FBK technology is pushed forth from the design to the fabrication, packaging and testing, the focus of this paper will be mainly devoted to modeling and simulation aspects. In conclusion, a couple of fabricated RF-MEMS passives examples will be listed and discussed.