Title :
Addressable Micromachined Jet Arrays
Author :
Coe, David J. ; Allen, Mark G. ; Smith, Barton L. ; Glezer, Ari
Keywords :
Actuators; Aluminum; Biomembranes; Electrodes; Fabrication; Orifices; Polyimides; Silicon; Sputter etching; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721813
