• DocumentCode
    1800789
  • Title

    First results on the characterization of new semitransparent amorphous silicon sensors [position sensors]

  • Author

    Calderon, A. ; Virto, A.L. ; Luque, J.M.

  • Author_Institution
    Inst. de Fisica, Univ. de Cantabria, Santander, Spain
  • Volume
    2
  • fYear
    2004
  • fDate
    18-20 May 2004
  • Firstpage
    1021
  • Abstract
    We present first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties such as a precision better than 5 μm, deflection angles smaller than 10 μrad and transmission in the visible higher than 70%. In addition the sensitive area is very large: 30×30 cm2.
  • Keywords
    amorphous semiconductors; elemental semiconductors; photodetectors; position measurement; silicon; 2D position detecting sensors; 30 cm; ALMY sensors; Si; deflection angle; large sensitive area size; multipoint alignment; semitransparent amorphous silicon sensors; visible region light transmission; Amorphous silicon; Character generation; Electrodes; Glass; Laser beams; Magnetic sensors; Optical sensors; Sensor phenomena and characterization; Strips; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Instrumentation and Measurement Technology Conference, 2004. IMTC 04. Proceedings of the 21st IEEE
  • ISSN
    1091-5281
  • Print_ISBN
    0-7803-8248-X
  • Type

    conf

  • DOI
    10.1109/IMTC.2004.1351235
  • Filename
    1351235
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1800789