DocumentCode

1801298

Title

Double Pass Metallization For Cmos Aluminum Actuators

Author

Buhler, J. ; Funk, J. ; Steiner, F.-P. ; Sarro, P.M. ; Baltes, H.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

360

Lastpage

363

Keywords

Aluminum; CMOS process; Circuits; Electrostatic actuators; Etching; Fasteners; Finite element methods; Metallization; Mirrors; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721821

Filename

721821