Title :
An Application Of Mechanical Leverage To Microactuation
Author :
Smegowski, J.J. ; Smith, C.
Keywords :
Actuators; Capacitors; Electrodes; Electrostatics; Fingers; Laboratories; Micromachining; Micromechanical devices; Transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721822
