Title :
Tactile Microgripper For Automated Handling Of Microparts
Author :
Greitmann, Georg ; Buser, Rudolf A.
Keywords :
Actuators; Fingers; Force measurement; Force sensors; Grippers; Piezoresistance; Scanning electron microscopy; Silicon; Thermal expansion; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721824
