Title :
A nano lead on a force sensing cantilever for bilateral manipulation of a single cell
Author :
Shuzo, Masaki ; Arai, Hidekazu ; Kanzaki, Ryohei ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano Informatics, Tokyo Univ., Japan
Abstract :
During cell manipulation using a micro probe, an operator was not able to realize the force acting on a cell until now. Using the MEMS technique, a probe combining a micro electrode and a force sensor is able to be fabricated. The depth type probe will help the operator insert the probe into the cell. In this paper, the fabrication method and the result of bilateral manipulation was shown.
Keywords :
biological techniques; cellular biophysics; force sensors; microelectrodes; microsensors; nanotechnology; MEMS; bilateral manipulation; force sensing cantilever; force sensor; microelectrode; microprobe; nano lead; piezo-resistive cantilever; single cell; Atomic force microscopy; Electrodes; Etching; Fabrication; Force measurement; Force sensors; Gold; Hafnium; Probes; Silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497423
