Title :
An Electrostatfcally Actuated Micro-relay
Author :
Drake, Joe ; Jerrnan, H. ; Lutze, Bob ; Stuber, Mike
Keywords :
Actuators; Automatic test equipment; Equations; Glass; Leakage current; Microrelays; Relays; Silicon; Solid state circuits; Switches;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721826
