DocumentCode

1801421

Title

An Electrostatfcally Actuated Micro-relay

Author

Drake, Joe ; Jerrnan, H. ; Lutze, Bob ; Stuber, Mike

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

380

Lastpage

383

Keywords

Actuators; Automatic test equipment; Equations; Glass; Leakage current; Microrelays; Relays; Silicon; Solid state circuits; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721826

Filename

721826