DocumentCode

1801559

Title

Object Positioning Using A Surface Micromachined Distributed System

Author

Goosen, J.F.L. ; Wolffenbuttel, R.F.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

396

Lastpage

399

Keywords

Capacitors; Electronic circuits; Electrostatic actuators; Fasteners; Force sensors; Geometry; Instruments; Laboratories; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721830

Filename

721830