Title :
An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication
Author :
Legtenberg, Rob ; Berenschot, Erwin ; van Baar, J. ; Lammerink, Theo ; Elwenspoek, Miko
Keywords :
Electrostatics; Fabrication; Gears; Mechanical systems; Micromachining; Micromotors; Predictive models; Rotors; Stators; Torque;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721832
