An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication

Author

Legtenberg, Rob ; Berenschot, Erwin ; van Baar, J. ; Lammerink, Theo ; Elwenspoek, Miko

Volume

fYear

1995

fDate

25-29 June 1995

Firstpage

404

Lastpage

407

Keywords

Electrostatics; Fabrication; Gears; Mechanical systems; Micromachining; Micromotors; Predictive models; Rotors; Stators; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721832

Filename

721832

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