Title :
Design, Fabrication, And Testing Of A C-shape Actuator
Author :
Lin, G. ; Kim, C.-J. ; Konishi, S. ; Fujita, H.
Keywords :
Actuators; Curing; Fabrication; Gold; Internal stresses; Performance analysis; Polyimides; Temperature; Testing; Thermal expansion;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721835
