An analytic treatment for radial density profiles of a large ECR source

Summary form only given, as follows. Radial variations of ion densities are measured by a scanning electric probe in a large electron cyclotron resonance plasma source with diameter 160 cm and height 70 cm. Measured density profiles are explained by an analytic fluid model based upon the classical transport theory assuming the plasma generation along the resonance layer. Dependance of density profiles on the position of resonance layer and magnitude of magnetic flux along the radial direction are analyzed. Improvement of uniformity by changing the resonance position and application to the development of larger plasma sources will be discussed.