Title :
A Bi-directional Silicon Orifice Flow Sensor Characterised For Fluid Temperature And Pressure
Author :
van der Wie, A.J. ; Boillat, M.A. ; de Rooij, N.F.
Keywords :
Apertures; Bidirectional control; Bonding; Bridge circuits; Orifices; Piezoresistance; Sensor phenomena and characterization; Shape; Silicon; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721836
