DocumentCode
18022
Title
A 0.13- 
m CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System
Author
Taghvaei, M. Ali ; Cicek, Paul-Vahe ; Allidina, Karim ; Nabki, Frederic ; El-Gamal, Mourad N.
Author_Institution
McGill Univ., Montreal, QC, Canada
Volume
60
Issue
12
fYear
2013
fDate
Dec. 2013
Firstpage
3136
Lastpage
3144
Abstract
This paper presents the design of the interface circuit for a novel MEMS-based vacuum measurement system topology. The system is designed to target a vacuum range from 10 to 1200 mbar , providing a theoretical pressure resolution of 2 mbar over the temperature range from -10°C to 60°C. The proposed circuit is designed and fabricated in an IBM 0.13- μm CMOS process. Measurements show the circuit consumes 62 μW from a 1.2-V supply, and has a maximum response time of 2 ms. This work is a critical step towards the goal of building a low-power, monolithic, integrated MEMS-based temperature-compensated vacuum measurement system.
Keywords
CMOS integrated circuits; micromechanical resonators; vacuum measurement; CMOS interface circuit; IBM process; MEMS resonator; power 62 muW; pressure 10 mbar to 1200 mbar; pressure 2 mbar; size 0.13 mum; temperature -10 degC to 60 degC; temperature-compensated system; time 2 ms; vacuum measurement system topology; voltage 1.2 V; Frequency measurement; Micromechanical devices; Mixers; Oscillators; Radiation detectors; Resonant frequency; Temperature measurement; Frequency-to-digital converters; MEMS resonators; integrated sensor interface circuits; resonant vacuum sensors;
fLanguage
English
Journal_Title
Circuits and Systems I: Regular Papers, IEEE Transactions on
Publisher
ieee
ISSN
1549-8328
Type
jour
DOI
10.1109/TCSI.2013.2265976
Filename
6605564
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