• DocumentCode
    1802343
  • Title

    The effects of electronic beam radiation on tin dioxide gas sensors

  • Author

    Wu, Minghong ; Jiao, Zheng ; Li, Zhen ; Liu, Tiebing ; Wang, Deqing ; Xiang Geng

  • Author_Institution
    Shanghai Appl. Radiat. Inst., Shanghai Univ., China
  • Volume
    2
  • fYear
    2005
  • fDate
    5-9 June 2005
  • Firstpage
    1896
  • Abstract
    In this paper the effects of electron beam irradiation on the gas sensing performance of SnO2 thin films toward NO2 are studied. The SnO2 thin films were prepared by ultrasonic spray pyrolysis. Results show the sensitivity increased after electron beam irradiation.
  • Keywords
    electron beam effects; gas sensors; pyrolysis; thin films; tin compounds; ultrasonic applications; SnO2; SnO2 thin film; electron beam irradiation; electronic beam radiation; gas sensing performance; tin dioxide gas sensor; ultrasonic spray pyrolysis; Electron beams; Gas detectors; Optical films; Organic light emitting diodes; Semiconductor materials; Spraying; Surface resistance; Thin film sensors; Tin; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1497467
  • Filename
    1497467
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1802343