DocumentCode
1802478
Title
Ethanol sensor based on layered WO3/ZnO/36° LiTaO3 SAW devices
Author
Ippolito, S.J. ; Ponzoni, A. ; Kalantar-zadeh, K. ; Wlodarski, W. ; Comini, E. ; Faglia, G. ; Sberveglieri, G.
Author_Institution
Sch. of Electr. & Comput. Eng., RMIT Univ., Australia
Volume
2
fYear
2005
fDate
5-9 June 2005
Firstpage
1915
Abstract
Layered surface acoustic wave (SAW) devices for the detection of ethanol in dry and humid air were fabricated on 36° YX LiTaO3 utilizing a 1.2 μm zinc oxide (ZnO) intermediate layer. A 150 nm tungsten trioxide (WO3) sensing layer was deposited via r.f. sputtering. Sensor performance was analyzed in terms of response magnitude as a function of operational temperature. Different relative humidity (RH) levels for various ethanol concentrations were investigated. Frequency shifts of 119 kHz, 90 kHz and 86 kHz towards 500 ppm of ethanol in air were observed for 0%, 25% and 50% RH, measured at 20 °C, respectively. The effect of elevated temperatures on the sensors´ surface morphology is presented. The influence of humidity on sensitivity is investigated at different operating temperatures. At the highest sensor operating temperature of 300 °C, the largest response was observed.
Keywords
gas sensors; lithium compounds; sputter deposition; surface acoustic wave sensors; surface morphology; tungsten compounds; zinc compounds; 1.2 micron; 150 nm; 20 C; 300 C; LiTaO3; SAW device; WO3; ZnO; dry air; ethanol concentration; ethanol detection; ethanol sensor; humid airzinc oxide; layered tungsten trioxide; relative humidity; rf sputtering; sensor performance; surface acoustic wave device; surface morphology; Acoustic sensors; Acoustic signal detection; Acoustic waves; Ethanol; Humidity; Surface acoustic wave devices; Surface acoustic waves; Surface morphology; Temperature sensors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497472
Filename
1497472
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