• DocumentCode
    1802637
  • Title

    Multiwall carbon nanotubes grown on a four-probe patterned catalyst layer for chemical sensor applications

  • Author

    Jeong-Soo Lee ; Chandrashekar, A. ; Parikh, K. ; Cattanach, K. ; Manohar, S.K. ; Lee, Jeong-Soo ; Overzet, L.

  • Author_Institution
    Dept. of Electr. Eng., Texas Univ., Dallas, TX, USA
  • Volume
    2
  • fYear
    2005
  • fDate
    5-9 June 2005
  • Firstpage
    1943
  • Abstract
    The fabrication and the application of aligned multi-wall carbon nanotubes (MWNTs) grown on a four-probe patterned catalyst layer for the detection of chemical vapors are reported. The temperature resistance results show that the aligned MWNTs are semiconducting and follow the 3-dimensional hopping conduction mechanism. Effects of oxygen plasma on the characteristics of the MWNTs are also investigated. The four-probe MWNTs devices show resistance changes with exposure to gas vapors and that correlate with solvent polarity parameters. Those results suggest that our four-probe MWNTs devices are promising for chemical sensor applications.
  • Keywords
    carbon nanotubes; gas sensors; photoresists; MWNT; PECVD; chemical sensor; chemical vapors detection; four-probe patterned catalyst layer; gas vapors; hopping conduction mechanism; multiwall carbon nanotubes; oxygen plasma; solvent polarity parameters; temperature resistance; Carbon nanotubes; Chemical sensors; Fabrication; Plasma applications; Plasma chemistry; Plasma devices; Plasma properties; Plasma temperature; Semiconductivity; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1497479
  • Filename
    1497479