DocumentCode
1802960
Title
Scalable flexible chip-level parylene package for high lead count retinal prostheses
Author
Rodger, Damien C. ; Weiland, James D. ; Humayun, Mark S. ; Yu-chong Tai
Author_Institution
Dept. of Bioeng., California Inst. of Technol., Pasadena, CA, USA
Volume
2
fYear
2005
fDate
5-9 June 2005
Firstpage
1973
Abstract
The authors presented an innovative technology for the fabrication of a biocompatible parylene-based high lead count retinal prosthesis in which a prefabricated stand-alone application-specific integrated circuit (ASIC) is placed directly into the fabrication process of the other system components. The package is fabricated in such a way that the ASIC-to-electrode interconnects are patterned using standard photolithography. The density of interconnects is fully scalable to the limits of lithography. This packaging scheme also enables the simultaneous integration and interconnection of discrete components such as chip capacitors with the rest of the system. Electrical test results verify the efficacy of this cost-effective and high-yield packaging scheme, and pave the way for a monolithic implantable parylene-based intraocular system.
Keywords
application specific integrated circuits; artificial organs; biomedical electrodes; electronics packaging; eye; microelectrodes; micromechanical devices; photolithography; polymers; ASIC; application specific integrated circuit; biocompatibility; high lead count retinal prostheses; photolithography; scalable flexible chip level parylene package; Application specific integrated circuits; Capacitors; Fabrication; Integrated circuit interconnections; Integrated circuit packaging; Integrated circuit technology; Lithography; Prosthetics; Retina; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497487
Filename
1497487
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