Force-calibrated AFM with rhombus-shaped cantilever for bending test of micro/nanoscale thin films

Author

Baek, Chana-Wook ; Kim, Jong-Man ; Kim, Yong-Kweon ; Lee, Hak-Joo ; Kim, Jae-Hyun ; Cho, Kiho

Author_Institution

Sch. of Electr. & Electron. Eng., Chung-Ang Univ., Seoul, South Korea

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

2027

Abstract

In this paper, force-calibrated AFM device with a novel rhombus-shaped AFM cantilever has been demonstrated for bending test of micro/nanoscale thin films. The rhombus-shaped AFM cantilever is designed to be symmetric around the loading axis, and thus robust to the lateral movement that a conventional beam-shaped AFM cantilever may have. This new cantilever structure has been fabricated and assembled with the AFM to measure the mechanical properties of gold strip specimens. With appropriate calibration procedures, this system can improve the measurement accuracy of the strip bending test.

Keywords

atomic force microscopy; calibration; mechanical properties; mechanical testing; micromechanical devices; nanotechnology; thin films; bending test; force calibrated AFM; microscale thin films; nanoscale thin films; rhombus shaped cantilever; Assembly; Gold; Mechanical factors; Mechanical variables measurement; Nanoscale devices; Robustness; Strips; Testing; Thin film devices; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497500

Filename

1497500