High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip

Author

Pang, Wei ; Zhang, Hao ; Kim, Jong Jin ; Yu, Hongyu ; Kim, Eun Sok

Author_Institution

Dept. of Electr. Eng., Southern California Univ., Los Angeles, CA, USA

Volume

2

fYear

2005

fDate

5-9 June 2005

Firstpage

2057

Abstract

This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Q_loaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm³. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Keywords

Q-factor; acoustic resonator filters; micromachining; micromechanical resonators; microwave oscillators; voltage-controlled oscillators; 2.5 GHz; FBAR; HBAR; Pierce oscillator; film bulk acoustic resonator filter; high tone bulk acoustic resonator; loaded quality factor; microwave oscillators; surface micromachined filter; voltage controlled oscillator; Acoustic waves; Film bulk acoustic resonators; Frequency; Microwave oscillators; Piezoelectric films; Q factor; Resonator filters; Substrates; Surface acoustic waves; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1497507

Filename

1497507