Title :
Thermal Based Micro Flow Sensor Optimization Using Coupled Electrothermal Numerical Simulations
Author :
Nagata, Mitsuhiko ; Swart, Nicholas ; Stevens, Malcolm ; Nathan, Arokia
Keywords :
Biomembranes; Boundary conditions; Electrothermal effects; Heat transfer; Heating; Numerical simulation; Silicon; Solid modeling; Temperature sensors; Thermal sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721843
