• DocumentCode
    1803810
  • Title

    Ultraviolet sensor of non-bias type; layered film structure of photovoltaic ferroelectrics

  • Author

    Ichiki, Masaaki ; Furue, Harumi ; Kobayashi, Takeshi ; Morikawa, Yasushi ; Nonaka, Kazuhiro ; Maeda, Ryutaro ; Nakada, Takashi ; Endo, Chiaki

  • Author_Institution
    National Inst. of Adv. Ind. Sci. & Technol., Tokyo, Japan
  • Volume
    2
  • fYear
    2005
  • fDate
    5-9 June 2005
  • Firstpage
    2107
  • Abstract
    This paper reports on the formation of layered film structures and the highly improved photoinduced output current of the lead lanthanum zirconate titanate (PLZT) employed. The photovoltaic effect of ferroelectrics has the advantage of its simple mechanisms of non-bias applications which are indispensable for semiconductor p-n junctions. The new design is described using an upper transparent indium tin oxide (ITO) electrode. The photovoltaic current of the PLZT film was more than 10 times than that of bulk PLZT. The PLZT film also has the advantage of easy output control and suitability for use on Si. Results show that the photovoltaic effect of the ferroelectric layered film is useful as the current source for micro-electro-mechanical systems (MEMS).
  • Keywords
    constant current sources; ferroelectric thin films; indium compounds; lanthanum compounds; lead compounds; micromechanical devices; p-n junctions; photodetectors; photovoltaic effects; ultraviolet detectors; ITO; InSnO; PLZT; PbLaZrO3TiO3; current source; ferroelectric layered film; layered film structure; micro-electro-mechanical systems; nonbias type applications; photoinduced output current; photovoltaic effect; photovoltaic ferroelectrics; semiconductor p-n junctions; ultraviolet sensor; Ferroelectric films; Ferroelectric materials; Indium tin oxide; Lanthanum; P-n junctions; Photovoltaic effects; Photovoltaic systems; Semiconductor films; Solar power generation; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1497519
  • Filename
    1497519