DocumentCode
1803810
Title
Ultraviolet sensor of non-bias type; layered film structure of photovoltaic ferroelectrics
Author
Ichiki, Masaaki ; Furue, Harumi ; Kobayashi, Takeshi ; Morikawa, Yasushi ; Nonaka, Kazuhiro ; Maeda, Ryutaro ; Nakada, Takashi ; Endo, Chiaki
Author_Institution
National Inst. of Adv. Ind. Sci. & Technol., Tokyo, Japan
Volume
2
fYear
2005
fDate
5-9 June 2005
Firstpage
2107
Abstract
This paper reports on the formation of layered film structures and the highly improved photoinduced output current of the lead lanthanum zirconate titanate (PLZT) employed. The photovoltaic effect of ferroelectrics has the advantage of its simple mechanisms of non-bias applications which are indispensable for semiconductor p-n junctions. The new design is described using an upper transparent indium tin oxide (ITO) electrode. The photovoltaic current of the PLZT film was more than 10 times than that of bulk PLZT. The PLZT film also has the advantage of easy output control and suitability for use on Si. Results show that the photovoltaic effect of the ferroelectric layered film is useful as the current source for micro-electro-mechanical systems (MEMS).
Keywords
constant current sources; ferroelectric thin films; indium compounds; lanthanum compounds; lead compounds; micromechanical devices; p-n junctions; photodetectors; photovoltaic effects; ultraviolet detectors; ITO; InSnO; PLZT; PbLaZrO3TiO3; current source; ferroelectric layered film; layered film structure; micro-electro-mechanical systems; nonbias type applications; photoinduced output current; photovoltaic effect; photovoltaic ferroelectrics; semiconductor p-n junctions; ultraviolet sensor; Ferroelectric films; Ferroelectric materials; Indium tin oxide; Lanthanum; P-n junctions; Photovoltaic effects; Photovoltaic systems; Semiconductor films; Solar power generation; Titanium compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1497519
Filename
1497519
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