Title :
Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate
Author :
Duan, Guang-Hua ; Cuisin, C. ; Derouin, E. ; Drisse, O. ; Legouezigou, L. ; Legouezigou, O. ; Pommereau, F. ; Gottesman, Yaneck ; Rao, E.V.K. ; Wild, B. ; Houdre, R.
Author_Institution :
Alcatel Res. & Innovation, Nozay, France
Abstract :
Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.
Keywords :
indium compounds; optical fibre couplers; optical fibre fabrication; optical losses; optical planar waveguides; photonic crystals; sputter etching; InP; inductively coupled plasma etching; optical characterization; photonic crystal waveguide fabrication; substrate approach; Etching; Indium phosphide; Integrated optics; Optical device fabrication; Optical losses; Optical waveguides; Photonic crystals; Plasma applications; Plasma chemistry; Resists;
Conference_Titel :
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN :
1-55752-783-0
DOI :
10.1109/OFC.2005.192520
