DocumentCode
1805201
Title
Fabrication and characterization of low loss photonic crystal waveguides based on InP substrate
Author
Duan, Guang-Hua ; Cuisin, C. ; Derouin, E. ; Drisse, O. ; Legouezigou, L. ; Legouezigou, O. ; Pommereau, F. ; Gottesman, Yaneck ; Rao, E.V.K. ; Wild, B. ; Houdre, R.
Author_Institution
Alcatel Res. & Innovation, Nozay, France
Volume
1
fYear
2005
fDate
6-11 March 2005
Abstract
Photonic crystal waveguides, fabricated on InP substrate using an inductively coupled plasma etching process, show propagation losses of 40dB/mm with one missing row and of less than 10 dB/mm with three missing rows.
Keywords
indium compounds; optical fibre couplers; optical fibre fabrication; optical losses; optical planar waveguides; photonic crystals; sputter etching; InP; inductively coupled plasma etching; optical characterization; photonic crystal waveguide fabrication; substrate approach; Etching; Indium phosphide; Integrated optics; Optical device fabrication; Optical losses; Optical waveguides; Photonic crystals; Plasma applications; Plasma chemistry; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN
1-55752-783-0
Type
conf
DOI
10.1109/OFC.2005.192520
Filename
1497600
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