Title :
Polysiloxane based optical waveguide equipped with fiber guides by using direct photolithography technique
Author :
Maeda, Yukio ; Takase, Hideaki ; Tamaki, Kentarou ; Huang, Fujun ; Eriyama, Yuichi
Author_Institution :
Tsukuba Res. Lab., JSR Corp., Ibaraki, Japan
Abstract :
Fabrication of polysiloxane based optical waveguide with fiber guides by using a direct photolithography technique was developed. The precise patterned fiber guides allowed performing a simple and cost saving alignment without use of fiber arrays.
Keywords :
optical communication equipment; optical fibre fabrication; optical polymers; optical waveguides; photolithography; direct photolithography technique; fiber guide; optical waveguide; polysiloxane fabrication; Coatings; Lithography; Optical arrays; Optical device fabrication; Optical fibers; Optical materials; Optical refraction; Optical variables control; Optical waveguides; Surface waves;
Conference_Titel :
Optical Fiber Communication Conference, 2005. Technical Digest. OFC/NFOEC
Print_ISBN :
1-55752-783-0
DOI :
10.1109/OFC.2005.192524
