Title :
Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam
Author :
Wei, Leow Cheah ; Mohammad, Abu Bakar ; Kassim, Norazan Mohd
Author_Institution :
Fac. of Electr. Eng., Univ. Teknologi Malaysia, Johor, Malaysia
Abstract :
A new analytical model has been developed for determining the pull-in voltage of an electrostatic actuated microelectromechanical system (MEMS) cantilever beam. The model takes into account the beam curvature caused by residual stress or stress gradient in the beam material. It can be used to model straight, curled and beam with mixture of straight and curled sections. Modeling result has been compared with published work of other researchers as well as with experimental measurement of this work and is found to be accurate.
Keywords :
electrostatic actuators; internal stresses; analytical modeling; beam material; electrostatic actuated MEMS cantilever beam; microelectromechanical system; pull-in voltage; residual stress; Analytical models; Electrostatic actuators; Electrostatic analysis; Electrostatic measurements; Fabrication; Microelectromechanical devices; Micromechanical devices; Residual stresses; Structural beams; Voltage;
Conference_Titel :
Semiconductor Electronics, 2002. Proceedings. ICSE 2002. IEEE International Conference on
Print_ISBN :
0-7803-7578-5
DOI :
10.1109/SMELEC.2002.1217814
