Title :
Properties of plasmas generated by a sheath-helix antenna
Author :
Uhm, Han S. ; Uhm, S.H. ; Chang, Hong-Yeh
Author_Institution :
Ajou Univ., Suwon, South Korea
Abstract :
Summary form only given. A theoretical model of the plasmas generated by a sheath-helix antenna is developed for axisymmetric perturbations. The system configuration consists of a cylindrical plasma column inside a dielectric tube of radius R. The eigenvalue equation is obtained inside the plasma column and the eigenfunction is identified as the Bessel faction Jo(x) of the first kind of order zero. The radial wave numbers for the eigenfunction are described in terms of the rf frequency and plasma density. An algebraic dispersion relation is analytically obtained. Several eigenmodes are identified from the dispersion relation. They are the low-frequency whistler-like mode, the Trivelpiece-Gould mode (TG), and the lower-hybrid mode. Properties of the plasmas and perturbed fields excited by a single-loop antenna are experimentally investigated. A cross-sectional view of the light emission indicates that the helicon-plasma density generated at the lower-hybrid frequency has a hollow profile. The azimuthal component of the perturbed electric field is obtained experimentally and its radial profile is found to be similar to the theoretical model. The emission peak coincides with the radial location of the strongest electric-field intensity. The experimental observations of the field profiles agree remarkably well with theoretical predictions.
Keywords :
antennas in plasma; eigenvalues and eigenfunctions; plasma hybrid waves; plasma instability; plasma production; plasma sheaths; Bessel function; RF frequency; Trivelpiece-Gould mode; algebraic dispersion relation; axisymmetric perturbations; azimuthal component; cross-section; cylindrical plasma column; dielectric tube; eigenfunction; eigenmodes; eigenvalue equation; electric field intensity; emission peak; helicon-plasma density; hollow profile; low-frequency whistler-like mode; lower-hybrid frequency; lower-hybrid mode; perturbed electric field; plasma column; plasma generation; radial location; radial profile; radial wave numbers; sheath-helix antenna; single-loop antenna; system configuration; Antenna theory; Dielectrics; Dispersion; Eigenvalues and eigenfunctions; Frequency; Plasma density; Plasma properties; Plasma sheaths; Plasma waves; Radiofrequency identification;
Conference_Titel :
Pulsed Power Plasma Science, 2001. IEEE Conference Record - Abstracts
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7141-0
DOI :
10.1109/PPPS.2001.961274