Title :
Bulk acoustic sensor of 2-nitro-5,10,15,20-tetraphenyl-21H,23H-porphinecopper(III) thin film to detect organic vapours
Author :
Mohamed, Ruziana ; Salleh, Muhamad Mat ; Yahaya, Muhammad
Author_Institution :
Sch. of Appl. Phys., Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
A bulk acoustic sensor system was fabricated to detect organic vapours of toluene, benzene, hexane and cyclohexane. The system consists of Langmuir Blodgett thin film deposited on a quartz crystal. The sensing sensitivity was based on the changes of the fundamental frequency of the quartz crystal upon exposure toward vapours. It was found that the thin film was sensitive to the present of gases by reducing the crystal frequency as high as 13 Hz, 8 Hz, 4 Hz, and 3 Hz for toluene, benzene, hexane and cyclohexane respectively. The response time to reach the maximum changes on the frequency was within 200 seconds. The recovery time after the vapors removed from the system was within 200 seconds. The variation of response with the type of vapours may be used as selectivity criteria for the sensor.
Keywords :
Langmuir-Blodgett films; chemical sensors; copper compounds; organic compounds; vapour deposition; 13 Hz; 2-nitro-5,10,15,20-tetraphenyl-21H,23H-porphinecopper(III); 200 sec; 3 Hz; 4 Hz; 8 Hz; Langmuir Blodgett thin film; SiO2; acoustic sensor system; benzene; cyclohexane; hexane; organic vapours; quartz crystal; toluene; Acoustic sensors; Acoustic signal detection; Chemical sensors; Crystalline materials; Frequency; Gases; Sputtering; Substrates; Thin film sensors; Transistors;
Conference_Titel :
Semiconductor Electronics, 2002. Proceedings. ICSE 2002. IEEE International Conference on
Print_ISBN :
0-7803-7578-5
DOI :
10.1109/SMELEC.2002.1217866