An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor

Understanding the deflection behavior of micro-machined diaphragms is necessary for designing mechanical sensors such as pressure sensors. An analytical study on the diaphragm behavior with different structures for micro-machined capacitive pressure sensor is presented in this paper. In general, analytical solutions for diaphragm behavior are desirable because of their ease and the insight they provide to the designer. Specific geometric effects can be ascertained form these solutions. However, these solutions are generally only applicable for small deflections. The behaviors of fiat and corrugated diaphragms with various structural parameters and properties are analysed using the classical Timoshenko plate theory respectively.