Title :
Design and simulation of a CMOS compatible open-ended multilayered actuator
Author :
Syono, Mohd Ismahadi ; Majlis, Burhanuddin Yeop
Author_Institution :
MIMOS BHD, Kuala Lumpur, Malaysia
Abstract :
A doubly spring supported actuator/accelerometer has been designed and simulated based on a post-processing technique. The accelerometer is of area change type and can be self-tested. The multilayered feature allows the accelerometer to adjust its pull-in voltage accordingly without a comb drive feature built into it. AC and DC characteristics are presented together with analytical and simulation results.
Keywords :
CMOS integrated circuits; accelerometers; electric actuators; integrated circuit design; microactuators; semiconductor device models; CMOS compatible open-ended multilayered actuator; doubly spring supported actuator/accelerometer; post-processing technique; Accelerometers; Actuators; Aluminum; Analytical models; CMOS process; Dry etching; Fabrication; MIMO; Silicon; Titanium;
Conference_Titel :
Semiconductor Electronics, 2002. Proceedings. ICSE 2002. IEEE International Conference on
Print_ISBN :
0-7803-7578-5
DOI :
10.1109/SMELEC.2002.1217877
